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At high electric fields, the electrical energy stored in a soft elastomer dielectric can be comparable to the mechanical deformation energy it produces. This has led to the development of a class of electrically controlled, large strain dielectric elastomer actuators for soft robotics and energy harvesting devices. At large electric fields, the electro-mechanically induced deformation can lead to pseudo-periodic surface morphological instabilities which then grow with increasing field into stable pre-breakdown defects prior to final, irreversible electrical breakdown. Under these extremes of combined large electrical and mechanical deformations, the morphological evolution of the prebreakdown defects has not hitherto been reported. In contrast to the filamentary breakdown of much stiffer dielectrics, fluorescence confocal microscopy reveals an array of defects that evolve through a complex, reversible series of morphologies, transitioning from axi-symmetric ‘‘pits’’ to ‘‘crack-like’’ shapes that can ‘‘twist’’ and deflect, and finally open to form an array of holes. The observations suggest that the transitions, from axi-symmetric pits to flat, slit-like defects and then to an array of holes, are geometric instabilities. The implications for using a soft elastomer layer to increase the dielectric breakdown of a stiffer dielectric are discussed.